Process steps
Description

Layer Structure
layer structure

Layer Structure (Zoom)
layer structure (zoom)

p-type Doping (Boron)
p-type doping concentration(boron)

n-type Doping (Phosphorus)
n-type doping concentration(phosphorus)

Total Doping
total doping concentration

Total Doping (Zoom)
total doping concentration

1d Doping Profile (Boron)
1d doping profile (p-type)

1d Doping Profile (Phosphorus)
1d doping profile (n-type)